@inproceedings{263b18488cfe4a10aaf00e1318e00db1,
title = "Studies of asymmetric hysteresis loops and leakage current behaviors in Pt/Al2O3/SiO2/Si /PZT/Au structures prepared by MOCVD method",
abstract = "The polarization-voltage (P-V) and leakage currents density (J-V) characteristics were investigated on the ferroelectric PZT films deposited on Pt/Al2O3/SiO2/Si substrate with a vapordeposited gold top electrode. The P-V hysteresis loops and the J-V characteristics were measured after performing a rapid thermal annealing (RTA) process. A ferroelectric test system (Precision LC Radiant Technology) was used to measure their electrical properties with a 90-nm PZT thickness and an area of 7.85 x10-5 cm2. The measurements were taken by connecting a Pt bottom electrode to the drive of the precision LC and the Au top electrode to the drive of the precision LC. The P-V hysteresis and J-V characteristics of PZT samples showed the asymmetry for both measurements. The asymmetric hysteresis loops and leakage current behavior were shifted in the positive direction when the drive was applied to the Pt electrode, while being negatively shifted in the converse case. The asymmetric behavior of the polarized state in the hysteresis loops due to the electrode configuration resulted from different work function between the Pt and Au electrodes, further influencing the leakage current behavior.",
keywords = "Asymmetries, Au top electrode, Different work function, PZT films, Pt bottom electrode",
author = "Masruroh and Masayuki Toda",
year = "2012",
doi = "10.4028/www.scientific.net/AMM.110-116.294",
language = "English",
isbn = "9783037852620",
series = "Applied Mechanics and Materials",
publisher = "Trans Tech Publications Ltd",
pages = "294--298",
booktitle = "Mechanical and Aerospace Engineering",
note = "2nd International Conference on Mechanical and Aerospace Engineering, ICMAE 2011 ; Conference date: 29-07-2011 Through 31-07-2011",
}