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Studies of asymmetric hysteresis loops and leakage current behaviors in Pt/Al2O3/SiO2/Si /PZT/Au structures prepared by MOCVD method

  • Masruroh*
  • , Masayuki Toda
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The polarization-voltage (P-V) and leakage currents density (J-V) characteristics were investigated on the ferroelectric PZT films deposited on Pt/Al2O3/SiO2/Si substrate with a vapordeposited gold top electrode. The P-V hysteresis loops and the J-V characteristics were measured after performing a rapid thermal annealing (RTA) process. A ferroelectric test system (Precision LC Radiant Technology) was used to measure their electrical properties with a 90-nm PZT thickness and an area of 7.85 x10-5 cm2. The measurements were taken by connecting a Pt bottom electrode to the drive of the precision LC and the Au top electrode to the drive of the precision LC. The P-V hysteresis and J-V characteristics of PZT samples showed the asymmetry for both measurements. The asymmetric hysteresis loops and leakage current behavior were shifted in the positive direction when the drive was applied to the Pt electrode, while being negatively shifted in the converse case. The asymmetric behavior of the polarized state in the hysteresis loops due to the electrode configuration resulted from different work function between the Pt and Au electrodes, further influencing the leakage current behavior.

Original languageEnglish
Title of host publicationMechanical and Aerospace Engineering
PublisherTrans Tech Publications Ltd
Pages294-298
Number of pages5
ISBN (Print)9783037852620
DOIs
Publication statusPublished - 2012
Event2nd International Conference on Mechanical and Aerospace Engineering, ICMAE 2011 - Bangkok, Thailand
Duration: 29 Jul 201131 Jul 2011

Publication series

NameApplied Mechanics and Materials
Volume110-116
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Conference

Conference2nd International Conference on Mechanical and Aerospace Engineering, ICMAE 2011
Country/TerritoryThailand
CityBangkok
Period29/07/1131/07/11

Keywords

  • Asymmetries
  • Au top electrode
  • Different work function
  • PZT films
  • Pt bottom electrode

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