Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation

Sukma W. Fitriani; Dionysius J.D.H. Santjojo; Setyawan P. Sakti; Tatsuhiko Aizawa

doi:10.1109/SEATUC.2018.8788882

Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation

Sukma W. Fitriani
, Dionysius J.D.H. Santjojo
, Masruroh
, Setyawan P. Sakti
, Tatsuhiko Aizawa

Faculty of Mathematics and Natural Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

Diamond-like carbon (DLC) has been widely utilized in industries; e.g., the protective coating of punches and dies. The high-density plasma oxidation was used to make selective removal of the DLC films and to construct the three-dimensional micro-texture on the SKD11. Two-dimensional micro-texture was drawn onto these films via the maskless lithography patterning. Micro-dots with various diameters were utilized as a mask to make selective removal of unmasked DLC surfaces. The optical emission spectroscopy (OES) was used to make oxygen plasma diagnosis and to identify the active species for this plasma etching. The Raman spectroscopy was employed to analyze the masked and unmasked area after the etching process. The etching took place homogeneously within 7.2 ks process. The three-dimensional micro-texture of DLC was formed with the height of 18 μm. The formed micro-textures have a standard deviation less than 1 μm.

Original language	English
Title of host publication	Proceedings - 12th SEATUC Symposium, SEATUC 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538650943
DOIs	https://doi.org/10.1109/SEATUC.2018.8788882
Publication status	Published - Mar 2018
Event	12th South East Asian Technical University Consortium Sysmposium, SEATUC 2018 - Yogyakarta, Indonesia Duration: 12 Mar 2018 → 13 Mar 2018

Publication series

Name	Proceedings - 12th SEATUC Symposium, SEATUC 2018

Conference

Conference	12th South East Asian Technical University Consortium Sysmposium, SEATUC 2018
Country/Territory	Indonesia
City	Yogyakarta
Period	12/03/18 → 13/03/18

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Diamond-like carbon
High-density plasma
Micro-texturing
Oxygen etching
Oxygen plasma
RF-DC plasma

Access to Document

10.1109/SEATUC.2018.8788882

Cite this

Fitriani, S. W., Santjojo, D. J. D. H., Masruroh , Sakti, S. P., & Aizawa, T. (2018). Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation. In Proceedings - 12th SEATUC Symposium, SEATUC 2018 Article 8788882 (Proceedings - 12th SEATUC Symposium, SEATUC 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SEATUC.2018.8788882

@inproceedings{2dd46cae3546459e837915e84ff178ee,

title = "Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation",

abstract = "Diamond-like carbon (DLC) has been widely utilized in industries; e.g., the protective coating of punches and dies. The high-density plasma oxidation was used to make selective removal of the DLC films and to construct the three-dimensional micro-texture on the SKD11. Two-dimensional micro-texture was drawn onto these films via the maskless lithography patterning. Micro-dots with various diameters were utilized as a mask to make selective removal of unmasked DLC surfaces. The optical emission spectroscopy (OES) was used to make oxygen plasma diagnosis and to identify the active species for this plasma etching. The Raman spectroscopy was employed to analyze the masked and unmasked area after the etching process. The etching took place homogeneously within 7.2 ks process. The three-dimensional micro-texture of DLC was formed with the height of 18 μm. The formed micro-textures have a standard deviation less than 1 μm.",

keywords = "Diamond-like carbon, High-density plasma, Micro-texturing, Oxygen etching, Oxygen plasma, RF-DC plasma",

author = "Fitriani, \{Sukma W.\} and Santjojo, \{Dionysius J.D.H.\} and Masruroh and Sakti, \{Setyawan P.\} and Tatsuhiko Aizawa",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 12th South East Asian Technical University Consortium Sysmposium, SEATUC 2018 ; Conference date: 12-03-2018 Through 13-03-2018",

year = "2018",

month = mar,

doi = "10.1109/SEATUC.2018.8788882",

language = "English",

series = "Proceedings - 12th SEATUC Symposium, SEATUC 2018",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "Proceedings - 12th SEATUC Symposium, SEATUC 2018",

}

Fitriani, SW, Santjojo, DJDH , Masruroh, , Sakti, SP & Aizawa, T 2018, Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation. in Proceedings - 12th SEATUC Symposium, SEATUC 2018., 8788882, Proceedings - 12th SEATUC Symposium, SEATUC 2018, Institute of Electrical and Electronics Engineers Inc., 12th South East Asian Technical University Consortium Sysmposium, SEATUC 2018, Yogyakarta, Indonesia, 12/03/18. https://doi.org/10.1109/SEATUC.2018.8788882

Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation. / Fitriani, Sukma W.; Santjojo, Dionysius J.D.H.; Masruroh et al.
Proceedings - 12th SEATUC Symposium, SEATUC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 8788882 (Proceedings - 12th SEATUC Symposium, SEATUC 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation

AU - Fitriani, Sukma W.

AU - Santjojo, Dionysius J.D.H.

AU - Masruroh,

AU - Sakti, Setyawan P.

AU - Aizawa, Tatsuhiko

PY - 2018/3

Y1 - 2018/3

N2 - Diamond-like carbon (DLC) has been widely utilized in industries; e.g., the protective coating of punches and dies. The high-density plasma oxidation was used to make selective removal of the DLC films and to construct the three-dimensional micro-texture on the SKD11. Two-dimensional micro-texture was drawn onto these films via the maskless lithography patterning. Micro-dots with various diameters were utilized as a mask to make selective removal of unmasked DLC surfaces. The optical emission spectroscopy (OES) was used to make oxygen plasma diagnosis and to identify the active species for this plasma etching. The Raman spectroscopy was employed to analyze the masked and unmasked area after the etching process. The etching took place homogeneously within 7.2 ks process. The three-dimensional micro-texture of DLC was formed with the height of 18 μm. The formed micro-textures have a standard deviation less than 1 μm.

AB - Diamond-like carbon (DLC) has been widely utilized in industries; e.g., the protective coating of punches and dies. The high-density plasma oxidation was used to make selective removal of the DLC films and to construct the three-dimensional micro-texture on the SKD11. Two-dimensional micro-texture was drawn onto these films via the maskless lithography patterning. Micro-dots with various diameters were utilized as a mask to make selective removal of unmasked DLC surfaces. The optical emission spectroscopy (OES) was used to make oxygen plasma diagnosis and to identify the active species for this plasma etching. The Raman spectroscopy was employed to analyze the masked and unmasked area after the etching process. The etching took place homogeneously within 7.2 ks process. The three-dimensional micro-texture of DLC was formed with the height of 18 μm. The formed micro-textures have a standard deviation less than 1 μm.

KW - Diamond-like carbon

KW - High-density plasma

KW - Micro-texturing

KW - Oxygen etching

KW - Oxygen plasma

KW - RF-DC plasma

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BT - Proceedings - 12th SEATUC Symposium, SEATUC 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th South East Asian Technical University Consortium Sysmposium, SEATUC 2018

Y2 - 12 March 2018 through 13 March 2018

ER -

Micro-texturing into DLC coating on the SKD11 die via the high-density plasma oxidation

Abstract

Publication series

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UN SDGs

Keywords

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